Akulova, G. V. and Atepalihin, V. V. and Goryachev, A. V. and Kuznetsov, S. M. (2006) Thermal Control of Cantilever Bulk Displacement. Journal of NANO and MICROSYSTEM TECHNIQUE, 10 (10). pp. 17-22.
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Abstract
Development of an array of cantilevers having thermal operation control is discussed including calculation, fabrication and testing results. Calculations are based on the model of non-uniform Joule healing of layered structure of (he cantilever and its bending because of different layers expansion. Analytical and experimental dependencies of the thermally control led bulk displacement of the cantilever on the layers parameters are obtained and compared. The bulk displacement of the cantilever for the heating current 10 mA and operation voltage 4 V was 2.6 ?m.
| Item Type: | Article |
|---|---|
| ID Code: | 1990 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 19 Dec 2008 13:20 |
| Last Modified: | 12 Feb 2009 13:16 |
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