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Calculation of Curvature of Electrostatically Deflected MEMS RF Switches by Analytical and Finite-Element Approaches

I.V, Godovitsyn (2006) Calculation of Curvature of Electrostatically Deflected MEMS RF Switches by Analytical and Finite-Element Approaches. Journal of NANO and MICROSYSTEM TECHNIQUE, 11 (11). pp. 41-46.

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Official URL: http://www.microsystems.ru/

Abstract

In this work 2D calculation of deformation of electrostatically deflected MEMS RF switches using energy minimization method (Ritz method) is performed. Alternatively simulation of the same structures with help of finite-element implemented software (ANSYS) is carried out. Good agreement of results provided by both methods is shown and applicability of faster Ritz method to calculation of curvature of electrostatically controlled MEMS RF switches is discussed

Item Type:Article
ID Code:1988
Deposited By:Prof. Alexey Ivanov
Deposited On:19 Dec 2008 13:20
Last Modified:20 Mar 2009 08:58

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