V.D., Amelichev V.V.Saurov A.N. Verner (2006) Correlation between Micro System Technology and Technology of Microelectronics itself. Journal of NANO and MICROSYSTEM TECHNIQUE, 11 (11). pp. 10-14.
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Official URL: http://www.microsystems.ru/
There are more then 20 technologies of micro treatments for using in micro systems fabrication. It is clear that for mass production of indicated above devices is Si based technology of micro treatment. Using example of formation elastic MEMS it was shown ways of its fabrication technology of CMOS integrated micro circuits. Optimal way is simultaneous fabrication of general technological layers on the base of joint manufacturing CMOS and MEMS components can be development.
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||19 Dec 2008 13:20|
|Last Modified:||20 Mar 2009 08:58|
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