Nano Archive

Correlation between Micro System Technology and Technology of Microelectronics itself.

V.D., Amelichev V.V.Saurov A.N. Verner (2006) Correlation between Micro System Technology and Technology of Microelectronics itself. Journal of NANO and MICROSYSTEM TECHNIQUE, 11 (11). pp. 10-14.

Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.

Official URL: http://www.microsystems.ru/

Abstract

There are more then 20 technologies of micro treatments for using in micro systems fabrication. It is clear that for mass production of indicated above devices is Si based technology of micro treatment. Using example of formation elastic MEMS it was shown ways of its fabrication technology of CMOS integrated micro circuits. Optimal way is simultaneous fabrication of general technological layers on the base of joint manufacturing CMOS and MEMS components can be development.

Item Type:Article
ID Code:1987
Deposited By:Prof. Alexey Ivanov
Deposited On:19 Dec 2008 13:20
Last Modified:20 Mar 2009 08:58

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