Nano Archive

Nanocomposites SnOxMnOy for Microelectronic Gas Sensors.

S.I., Dyrda N. N.Komarova A.S. Rembeza E.S. Rembeza (2006) Nanocomposites SnOxMnOy for Microelectronic Gas Sensors. Journal of NANO and MICROSYSTEM TECHNIQUE, 11 (11). pp. 23-25.

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Official URL: http://www.microsystems.ru/

Abstract

The possibility of use film nanocomposite SnOx:MnOy, as gas sensitive layers for microelectronic gas sensors is discussed. Nanocomposites on the base SnO2 were fabricated by reactive ion-beam sputtering of composite target in the ambient of Ar+O2. Element composition, electrical-physical properties and gas sensitivity of the films were studied. It is shown that Mn additive decreases temperature of maximal gas sensitivity of film nanocomposites to ethanol, acetone, ammonia, propanol and formaldehyde vapors in the air. The conclusion about perspective of using film nanocomposiles SnOx:MnOy for microelectronic gas sensors is done.

Item Type:Article
ID Code:1985
Deposited By:Prof. Alexey Ivanov
Deposited On:19 Dec 2008 13:20
Last Modified:20 Mar 2009 08:58

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