S.I., Dyrda N. N.Komarova A.S. Rembeza E.S. Rembeza (2006) Nanocomposites SnOxMnOy for Microelectronic Gas Sensors. Journal of NANO and MICROSYSTEM TECHNIQUE, 11 (11). pp. 23-25.
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The possibility of use film nanocomposite SnOx:MnOy, as gas sensitive layers for microelectronic gas sensors is discussed. Nanocomposites on the base SnO2 were fabricated by reactive ion-beam sputtering of composite target in the ambient of Ar+O2. Element composition, electrical-physical properties and gas sensitivity of the films were studied. It is shown that Mn additive decreases temperature of maximal gas sensitivity of film nanocomposites to ethanol, acetone, ammonia, propanol and formaldehyde vapors in the air. The conclusion about perspective of using film nanocomposiles SnOx:MnOy for microelectronic gas sensors is done.
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||19 Dec 2008 13:20|
|Last Modified:||20 Mar 2009 08:58|
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