Kizilov, A.G. and Kuznetsov, I. M. and Shautsukov, G. D. (2006) The Modelling of Process of Formation Alloyed by Recoil Atoms of Layers. Journal of NANO and MICROSYSTEM TECHNIQUE, 11 (11). pp. 21-22.
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There arc developed the algorithms of modeling of process of formation nanodimensional layers alloyed by recoil atoms. Algorithms provide modeling process of introduction of recoil atoms in a layer with the set parameters and modeling of process photon annealing alloyed layer by recoil atoms. Numerical experiment is carried out and are determined: parameters received alloyed by recoil atoms of layers; a degree of redistribution of the introduced recoil atoms at photon annealing the created layers.
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||19 Dec 2008 13:20|
|Last Modified:||06 Feb 2009 14:33|
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