Nano Archive

The Modelling of Process of Formation Alloyed by Recoil Atoms of Layers.

Kizilov, A.G. and Kuznetsov, I. M. and Shautsukov, G. D. (2006) The Modelling of Process of Formation Alloyed by Recoil Atoms of Layers. Journal of NANO and MICROSYSTEM TECHNIQUE, 11 (11). pp. 21-22.

Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.

Official URL: http://www.microsystems.ru/

Abstract

There arc developed the algorithms of modeling of process of formation nanodimensional layers alloyed by recoil atoms. Algorithms provide modeling process of introduction of recoil atoms in a layer with the set parameters and modeling of process photon annealing alloyed layer by recoil atoms. Numerical experiment is carried out and are determined: parameters received alloyed by recoil atoms of layers; a degree of redistribution of the introduced recoil atoms at photon annealing the created layers.

Item Type:Article
ID Code:1981
Deposited By:Prof. Alexey Ivanov
Deposited On:19 Dec 2008 13:20
Last Modified:06 Feb 2009 14:33

Repository Staff Only: item control page