Nano Archive

"Silicon-on-Insulator" Technology in Microsystems.

N., Aristov V.V.Maltsev P.P. Mordkovich V. (2006) "Silicon-on-Insulator" Technology in Microsystems. Journal of NANO and MICROSYSTEM TECHNIQUE, 12 (12). pp. 41-47.

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Official URL: http://www.microsystems.ru/

Abstract

This paper discussed the prospects of "Silicon — On-Insulator" (SOI) technology in creation of microsystems with different function (such as sensors sensitive elements and ASIC, microelectromechanical systems, microfotonics elements) and describes the successful examples of practical SOI technology realization in microsystems.

Item Type:Article
ID Code:1980
Deposited By:Prof. Alexey Ivanov
Deposited On:19 Dec 2008 13:19
Last Modified:20 Mar 2009 08:58

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