N., Aristov V.V.Maltsev P.P. Mordkovich V. (2006) "Silicon-on-Insulator" Technology in Microsystems. Journal of NANO and MICROSYSTEM TECHNIQUE, 12 (12). pp. 41-47.
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Official URL: http://www.microsystems.ru/
Abstract
This paper discussed the prospects of "Silicon On-Insulator" (SOI) technology in creation of microsystems with different function (such as sensors sensitive elements and ASIC, microelectromechanical systems, microfotonics elements) and describes the successful examples of practical SOI technology realization in microsystems.
| Item Type: | Article |
|---|---|
| ID Code: | 1980 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 19 Dec 2008 13:19 |
| Last Modified: | 20 Mar 2009 08:58 |
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