Kamyshlov, E. G. and Kostsov, V. F. (2006) Microelectromechanical Micro-Valve. Journal of NANO and MICROSYSTEM TECHNIQUE, 12 (12). pp. 57-59.
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Official URL: http://www.microsystems.ru/
Abstract
It is considered the operational principle of a microelectromechanical micro-valve, based on the use of the effect of an electrostatic rolling of metallic films on the surface of a ferroelectric. These micro-valves, created by means of microelectronic technology, differ in high operating speed (microsecond range), capability to maintain a high pressure drop, manufacturability. Theoretical and experimental data, that characterize the operating process of the micro-valve, are given
| Item Type: | Article |
|---|---|
| ID Code: | 1978 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 19 Dec 2008 13:19 |
| Last Modified: | 20 Mar 2009 08:58 |
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