Nano Archive

Microelectromechanical Micro-Valve.

Kamyshlov, E. G. and Kostsov, V. F. (2006) Microelectromechanical Micro-Valve. Journal of NANO and MICROSYSTEM TECHNIQUE, 12 (12). pp. 57-59.

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Official URL: http://www.microsystems.ru/

Abstract

It is considered the operational principle of a microelectromechanical micro-valve, based on the use of the effect of an electrostatic rolling of metallic films on the surface of a ferroelectric. These micro-valves, created by means of microelectronic technology, differ in high operating speed (microsecond range), capability to maintain a high pressure drop, manufacturability. Theoretical and experimental data, that characterize the operating process of the micro-valve, are given

Item Type:Article
ID Code:1978
Deposited By:Prof. Alexey Ivanov
Deposited On:19 Dec 2008 13:19
Last Modified:20 Mar 2009 08:58

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