Nano Archive

The Assembly Process of Hybrid MEMS on the Basis of Three-Dimensional Reconstruction of the Technological Environment Condition.

Darintsev, A. B. and Migranov, O. V. (2006) The Assembly Process of Hybrid MEMS on the Basis of Three-Dimensional Reconstruction of the Technological Environment Condition. Journal of NANO and MICROSYSTEM TECHNIQUE, 12 (12). pp. 36-40.

Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.

Official URL: http://www.microsystems.ru/

Abstract

Problems of the organization of a visual feedback at realization technological processes of assembly hybrid MEMS are considered. The opportunity of use of three-dimensional reconstruction of the technological environment condition for expansion information support traditional feedback channels is shown.

Item Type:Article
ID Code:1976
Deposited By:Prof. Alexey Ivanov
Deposited On:19 Dec 2008 13:19
Last Modified:19 Feb 2009 16:45

Repository Staff Only: item control page