Summers, M. A. and Brett, M. J. (2008) Optimization of periodic column growth in glancing angle deposition for photonic crystal fabrication. NANOTECHNOLOGY, 19 (41).
|PDF - Published Version|
Official URL: http://dx.doi.org/10.1088/0957-4484/19/41/415203
We investigate the growth of periodically aligned silicon microstructures for the fabrication of square spiral photonic crystals using the glancing angle deposition phi-sweep process. We report the optimization of the phi-sweep offset angle for fabrication of microstructures with more precise geometry. The effects of varying the sweep offset angle of the phi-sweep process are studied for films deposited onto a square lattice array of growth seeds. To represent one growth segment of the phi-sweep process, we fabricate 15 nm silicon thin films using several azimuthal substrate offsets from 0 degrees to 45 degrees at a vapor incidence angle of 85 degrees. We also deposit silicon square spirals on square lattice arrays with the phi-sweep method, using various sweep offset angles from gamma = 0 degrees to 45 degrees. We find that using an offset angle of gamma = 26.5 degrees optimizes the shadowing geometry, which minimizes anisotropic broadening, producing greater quality photonic crystal structures. From normal incidence reflection spectroscopy, a maximum full width at half-maximum of 273 +/- 3 nm and a relative peak width (Delta lambda/lambda) of 16.1 +/- 0.1% were found for a sweep offset angle of gamma = 26.5 degrees.
|Subjects:||Material Science > Nanofabrication processes and tools|
Material Science > Nanostructured materials
Physical Science > Photonics
|Deposited By:||Farnush Anwar|
|Deposited On:||16 Dec 2008 15:48|
|Last Modified:||16 Dec 2008 15:48|
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