Nano Archive

Fabrication of photonic crystal structures on light emitting diodes by nanoimprint lithography

Kim, Sang Hoon and Lee, Ki-Dong and Kim, Ja-Yeon and Kwon, Min-Ki and Park, Seong-Ju (2007) Fabrication of photonic crystal structures on light emitting diodes by nanoimprint lithography. Nanotechnology, 18 (5). 055306-055311. ISSN 09574484

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Official URL: http://dx.doi.org/10.1088/0957-4484/18/5/055306

Abstract

Photonic crystal (PC) structures on green light emitting diodes (LED) were successfully fabricated using nanoimprint lithography. The stamp, with a two-dimensional pillar structure, was fabricated using laser interference lithography through a double exposure technique. To achieve PC structures with a precise dimension, thermal treatment of the photoresist was employed during stamp fabrication; this proved to be effective for the control of the diameter and shape of the hole. The two-dimensional PC structures, with a period of 295 nm, diameter of 180 nm and depth of 100 nm, on the green LEDs resulted in nine-fold enhancement of the photoluminescence intensity compared to the as-deposited samples without PC structures.

Item Type:Article
Subjects:Material Science > Nanofabrication processes and tools
Physical Science > Photonics
ID Code:187
Deposited By:Lesley Tobin
Deposited On:13 Nov 2008 15:54
Last Modified:30 Jan 2009 15:02

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