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A resistless photolithography method for robust markers and electrodes

Kulkarni, G. U. (2005) A resistless photolithography method for robust markers and electrodes. Solid State Sciences, 7 (12). pp. 1475-1478. ISSN 10.1016/j.solidstatesciences.2005.08.018

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We describe a method of resistless photolithography using laser for the fabrication of microscopic markers and electrodes. A single shot of laser (355 nm, 100 mJ) is used to induce local surface melting and thus transfer a pattern from the mask (TEM grid) on to the surface of silicon. With a silicon substrate pre-coated with a layer of phosphorus, the laser pulse selectively produces doped regions that are highly conducting. The electrodes and markers thus obtained are robust and can withstand harsh chemical treatments. The utility of the marker for dip-pen nanolithography is illustrated by performing gold colloid nanopatterning.

Item Type:Article
Subjects:Material Science > Nanofabrication processes and tools
Divisions:Faculty of Engineering, Science and Mathematics > School of Physics
ID Code:1607
Deposited By:JNCASR
Deposited On:03 Apr 2009 06:36
Last Modified:12 Aug 2009 11:35

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