Nano Archive

Highly Conducting Patterned Pd Nanowires by Direct-Write Electron Beam Lithography

Kulkarni, G. U. and Bhuvana, T (2008) Highly Conducting Patterned Pd Nanowires by Direct-Write Electron Beam Lithography. ACS NANO .

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Abstract

Palladium hexadecylthiolate is shown to serve as a negative-tone direct-write electron resist to produce nanopatterns down to 30 nm. The written patterns do not deviate much from the precursor in composition, while a post-treatment at 230 °C in air produced metallic Pd nanowires with residual carbon less than 10% and resistivity close to the bulk value, a desirable property of interconnects in nanocircuitry. The aswritten patterns contain small nanocrystals (<5 nm) in a hydrocarbon matrix, which upon annealing aggregate to form well-connected networks of larger nanocrystals (5–15 nm), thus giving rise to metallic conductivity.

Item Type:Article
Subjects:Material Science > Nanofabrication processes and tools
Divisions:Faculty of Engineering, Science and Mathematics > School of Chemistry
ID Code:1606
Deposited By:JNCASR
Deposited On:20 Jan 2009 11:43
Last Modified:29 Sep 2010 10:32

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