Nano Archive

Hydrofluoric acid free synthesis of macropores on silicon by chemical vapor deposition and their photoluminescence

Liu, Zhihong and Zhang, Hui and Wang, Lei and Li, Dongsheng and Yang, Deren (2008) Hydrofluoric acid free synthesis of macropores on silicon by chemical vapor deposition and their photoluminescence. PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 40 (3). pp. 494-498.

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Abstract

A novel hydrofluoric acid (HF) free atmospheric pressure chemical vapor deposition (APCVD) method has been developed to synthesize macropores on silicon. Field emission scanning electron microscopy (FESEM), X-ray powder diffraction (XRD) and energy-dispersive X-ray (EDX) spectrum indicate that the composition of macropores with the diameters of several hundred nanometers is silica. Moreover, the mechanism of the formation of the macropores has been preliminarily discussed. The photoluminescence (PL) spectrum of the macropores shows a broad violet emission band with the peak position at 402 nm, which is related with the defects of silica. (C) 2007 Published by Elsevier B.V.

Item Type:Article
Uncontrolled Keywords:HF free; macropores; APCVD; PL
Subjects:Analytical Science > Microscopy and probe methods
Material Science > Nanofabrication processes and tools
ID Code:1500
Deposited By:Farnush Anwar
Deposited On:11 Dec 2008 19:29
Last Modified:15 Jan 2009 13:43

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