Ryu, Koungmin and Zhang, Daihua and Zhoua, Chongwu (2008) High-performance metal oxide nanowire chemical sensors with integrated micromachined hotplates. APPLIED PHYSICS LETTERS, 92 (9).
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Official URL: http://link.aip.org/link/?APPLAB/92/093111/1
We demonstrate the fast and scalable integration of nanowire chemical sensors with micromachined hotplates built on SiN membranes. These hotplates allowed nanowire chemical sensors to operate at elevated temperatures in order to enhance the sensitivity of chemical sensors to target gases. By applying different currents through the platinum heating filament, we can easily vary the device temperature from room temperature to 350 degrees C. These nanosensors with integrated hot plates have been exploited for the detection of ethanol, CO, and hydrogen down to concentrations of 1, 10, and 50 ppm, respectively. (c) 2008 American Institute of Physics.
|Subjects:||Analytical Science > Nanotechnology for sensing and actuating|
Material Science > Nanochemistry
|Deposited By:||Anuj Seth|
|Deposited On:||15 Dec 2008 15:41|
|Last Modified:||19 Jan 2009 11:02|
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