Nano Archive

Ultrahigh-sensitive WO3 nanosensor with interdigitated Au nano-electrode for NO2 detection

Tamaki, Jun and Hashishin, Takeshi and Uno, Yudai and Dao, Dzung Viet and Sugiyama, Susumu (2008) Ultrahigh-sensitive WO3 nanosensor with interdigitated Au nano-electrode for NO2 detection. SENSORS AND ACTUATORS B-CHEMICAL, 132 (1). pp. 234-238.

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Official URL: http://dx.doi.org/10.1016/j.snb.2008.01.027

Abstract

Ultrahigh-sensitive WO3 nanosensors have been developed by using an interdigitated An nano-electrode for dilute NO2 detection. The interdigitated Au nano-electrodes with a line spacing of 200 nm and various teeth numbers were fabricated on a SiO2/Si substrate by means of electron beam lithography. A WO3 thin film was deposited on the interdigitated An nano-electrode to be a WO3 nanosensor. The nanosensor exhibited an extremely high sensor response (Rg/Ra = 28) to 0.01 ppm NO2 with excellent response-recovery characteristics. Interestingly, the sensor response increased with increasing the number of teeth in the interdigitated nano-electrode, i.e., the length of interface between oxide grain and An electrode. This suggests that the nano-design of electrode structure is important for development of a highly sensitive gas sensor. (C) 2008 Elsevier B.V. All rights reserved.

Item Type:Article
Uncontrolled Keywords:WO3 nanosensor; interdigitated an nano-electrode; dilute NO2 detection
Subjects:Material Science > Functional and hybrid materials
Analytical Science > Nanotechnology for sensing and actuating
Material Science > Nanostructured materials
ID Code:1229
Deposited By:Anuj Seth
Deposited On:16 Dec 2008 10:33
Last Modified:19 Jan 2009 11:29

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