Liu, W. J. and Zhang, J. and Wan, L. J. and Jiang, K. W. and Tao, B. R. and Li, H. L. and Gong, W. L. and Tang, X. D. (2008) Dielectrophoretic manipulation of nano-materials and its application to micro/nano-sensors. SENSORS AND ACTUATORS B-CHEMICAL, 133 (2). pp. 664-670.
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Official URL: http://dx.doi.org/10.1016/j.snb.2008.03.032
Dielectrophoresis is a potential technique which can be employed to align and manipulate nano-structured materials to the preset locations in fluid for electronic device applications in micro/nanosensors and Circuits. In this paper, with several home-made electrode pairs, we succeeded in manipulating the micro/nano-particies along the electric field and depositing them across the gaps between two electrodes. It is proven as a helpful experiment to assemble the nano-structures with precise arrangement. A relative humidity sensor, using the dielectrophoretically assembled self-grown nano-materials as a sensing element, was fabricated and the sensing properties were then tested. The sensitivity increased with the decline of the testing frequency. And a high humidity sensitivity of 146.90 k Omega/RH% was obtained with a testing frequency of 100 Hz. The relativity of the impedances measured at the same frequency was above -0.90. The relative standard deviations were small especially under a lower relative humidity level. The Comparison between aligned and not-aligned nano-materials in the sensing Structures was presented to verify the work of the dielectrophoresis. The detection result confirmed the feasibility of applying nano-materials located between the electrodes by dielectrophoresis as sensing elements to micro/nano-sensors. (c) 2008 Elsevier B.V. All rights reserved.
|Subjects:||Physical Science > Nanophysics|
Physical Science > Nanoelectronics
Material Science > Nanostructured materials
|Deposited By:||Anuj Seth|
|Deposited On:||16 Dec 2008 14:18|
|Last Modified:||19 Jan 2009 12:06|
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