Competitive nanotechnologies for nanoelectronics, piezoengineering, photocatalysis and composites particularly using electroless deposition

Abstract

Electroless metallization technology which allowed replacing adequately Au and Ag with Ni–P or Ni–B alloys and simplifying significantly the metallization process was developed. The proposed patentable nanomethods for the first time allow one to produce nanochips and photomasks with nano-sized adjacent elements by single optical UV photolithography. The proposed nanomethods are much more advantageous and simpler than other expensive and complicated methods such as e-beam, X-ray lithography or fabrication of nanoelements using light-phase-shift photomasks. The proposed methods of metallization are widely used in electronics, piezoengineering and instrument-making. As a result Au, Ag and Pd were replaced with the alloys of non-precious metals; usage of toxic substances was eliminated.