Nano Archive

Solid-state microscale lithium batteries prepared with microfabrication processes

Song, Jie and Yang, Xi and Zeng, Shuang-Shuang and Cai, Min-Zhen and Zhang, Liang-Tang and Dong, Quan-Feng and Ming-SenZheng, and Wu, Sun-Tao and Wu, Qi-Hui (2009) Solid-state microscale lithium batteries prepared with microfabrication processes. Journal of Micromechanics and Microengineering, 19 (4). 045004.

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The miniaturization of power sources is important for meeting the requirements of low power, mass and volume for nano- or microelectronics and MEMS devices. In this paper a dexterous microfabrication process was developed for preparing microscale solid-state lithium batteries. The active size of a single microbattery is 500 µm × 500 µm and its thickness is 1.5 µm. LiCoO 2 films prepared by RF sputtering, then annealed at moderate temperature (500 °C), were employed as a cathode electrode, and LiPON and Al films were used as a solid electrolyte and an anode electrode, respectively. An individual microbattery delivers a capacity of about 17 nAh at a current of 5 nA at the initial cycles, and can be operated at as high as 40 nA discharge current.

Item Type:Article
ID Code:11369
Deposited By:Prof. Alexey Ivanov
Deposited On:02 Nov 2011 00:15
Last Modified:02 Nov 2011 00:47

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