Song, Jie and Yang, Xi and Zeng, Shuang-Shuang and Cai, Min-Zhen and Zhang, Liang-Tang and Dong, Quan-Feng and Ming-SenZheng, and Wu, Sun-Tao and Wu, Qi-Hui (2009) Solid-state microscale lithium batteries prepared with microfabrication processes. Journal of Micromechanics and Microengineering, 19 (4). 045004.
Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.
Official URL: http://stacks.iop.org/0960-1317/19/i=4/a=045004
The miniaturization of power sources is important for meeting the requirements of low power, mass and volume for nano- or microelectronics and MEMS devices. In this paper a dexterous microfabrication process was developed for preparing microscale solid-state lithium batteries. The active size of a single microbattery is 500 Âµm Ã 500 Âµm and its thickness is 1.5 Âµm. LiCoO 2 films prepared by RF sputtering, then annealed at moderate temperature (500 Â°C), were employed as a cathode electrode, and LiPON and Al films were used as a solid electrolyte and an anode electrode, respectively. An individual microbattery delivers a capacity of about 17 nAh at a current of 5 nA at the initial cycles, and can be operated at as high as 40 nA discharge current.
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||02 Nov 2011 00:15|
|Last Modified:||02 Nov 2011 00:47|
Repository Staff Only: item control page