Nano Archive

A high precision micro/nano CMM using piezoresistive tactile probes

Dai, Gaoliang and Bütefisch, Sebastian and Pohlenz, Frank and Danzebrink, Hans-Ulrich (2009) A high precision micro/nano CMM using piezoresistive tactile probes. Measurement Science and Technology, 20 (8). 084001.

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To satisfy various demands of micro- and nanoscale-dimensional metrology, a coordinate measuring system based on a nano positioning and measuring machine (NMM) has been built. The measuring system is able to perform measurements by using sensors such as scanning force microscopes, stylus profilometers, optical fixed focus sensors and assembled cantilever probes. In recent years, two kinds of tactile micro/nano CMM probes have been developed and coupled to the system. In such a way, the function of the device has been expanded from a metrological SFM to a micro/nano CMM. In this paper, the development of the micro/nano CMM is reported. The design ideas concerning the key components of the CMM, such as positioning stage, probe and software, are introduced. The characterization of the probe is described in more detail. Measurements on a typical test artefact have been demonstrated as an example.

Item Type:Article
ID Code:11342
Deposited By:Prof. Alexey Ivanov
Deposited On:02 Nov 2011 00:10
Last Modified:02 Nov 2011 00:47

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