Nano Archive

Laser micro structuring on a Si substrate for improving surface hydrophobicity

Wang, X C and Wu, Linda Y L and Shao, Q and Zheng, H Y (2009) Laser micro structuring on a Si substrate for improving surface hydrophobicity. Journal of Micromechanics and Microengineering, 19 (8). 085025.

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Official URL: http://stacks.iop.org/0960-1317/19/i=8/a=085025

Abstract

355 nm diode-pumped solid-state (DPSS) ultraviolet (UV) laser-induced surface texturing on a Si substrate is reported in this paper. Surface patterns consisting of miro-size pits were produced by direct laser ablation. By fine-tuning key process variables such as laser beam fluence, pulse number, and beam spot separation, uniform and repeatable micropatterns with nano features have been generated on the Si surface. Under appropriate optimum laser conditions, the surface contact angle of the Si substrate was increased from 64.2° to 97.5°. Furthermore, it was demonstrated that the laser textured Si substrate could be used as a template for imprinting. After imprinting the laser-induced pattern onto the sol–gel film, the sol–gel film surface contact angle was increased by nearly 30° up to 138° due to two-tier rough surfaces.

Item Type:Article
ID Code:11339
Deposited By:Prof. Alexey Ivanov
Deposited On:02 Nov 2011 00:09
Last Modified:02 Nov 2011 00:47

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