Nano Archive

Micro/nano electro mechanical systems for practical applications

Esashi, Masayoshi (2009) Micro/nano electro mechanical systems for practical applications. Journal of Physics: Conference Series, 187 (1). 012001.

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Official URL: http://stacks.iop.org/1742-6596/187/i=1/a=012001

Abstract

Silicon MEMS as electrostatically levitated rotational gyroscope, 2D optical scanner and wafer level packaged devices as integrated capacitive pressure sensor and MEMS switch are described. MEMS which use non-silicon materials as diamond, PZT, conductive polymer, CNT (carbon nano tube), LTCC with electrical feedthrough, SiC (silicon carbide) and LiNbO 3 for multi-probe data storage, multi-column electron beam lithography system, probe card for wafer-level burn-in test, mould for glass press moulding and SAW wireless passive sensor respectively are also described.

Item Type:Article
ID Code:11320
Deposited By:Prof. Alexey Ivanov
Deposited On:01 Nov 2011 23:35
Last Modified:02 Nov 2011 00:47

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