Nano Archive

Micro/nano electro mechanical systems for practical applications

Esashi, Masayoshi (2009) Micro/nano electro mechanical systems for practical applications. Journal of Physics: Conference Series, 187 (1). 012001.

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Silicon MEMS as electrostatically levitated rotational gyroscope, 2D optical scanner and wafer level packaged devices as integrated capacitive pressure sensor and MEMS switch are described. MEMS which use non-silicon materials as diamond, PZT, conductive polymer, CNT (carbon nano tube), LTCC with electrical feedthrough, SiC (silicon carbide) and LiNbO 3 for multi-probe data storage, multi-column electron beam lithography system, probe card for wafer-level burn-in test, mould for glass press moulding and SAW wireless passive sensor respectively are also described.

Item Type:Article
ID Code:11320
Deposited By:Prof. Alexey Ivanov
Deposited On:01 Nov 2011 23:35
Last Modified:02 Nov 2011 00:47

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