Nano Archive

Fabrication of nano-gap electrodes and nano wires using an electrochemical and chemical etching technique

Sutanto, Jemmy and Smith, Rosemary L and Collins, Scotts D (2010) Fabrication of nano-gap electrodes and nano wires using an electrochemical and chemical etching technique. Journal of Micromechanics and Microengineering, 20 (4). 045016.

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Official URL: http://stacks.iop.org/0960-1317/20/i=4/a=045016

Abstract

This paper reports a simple and controllable technique to fabricate nano-gap electrodes using a combined electrochemical and chemical etching. A line of metal is initially patterned using a conventional lithography process at the width of 2 µm. The line is then continuously etched until it is discontinued at the desirable gap. We have been successfully fabricated a <10 nm gap between two Au electrodes. Meanwhile for Cr electrodes a controllable gap of <5 nm has been achieved.

Item Type:Article
ID Code:11241
Deposited By:Prof. Alexey Ivanov
Deposited On:01 Nov 2011 23:29
Last Modified:02 Nov 2011 00:47

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