Sutanto, Jemmy and Smith, Rosemary L and Collins, Scotts D (2010) Fabrication of nano-gap electrodes and nano wires using an electrochemical and chemical etching technique. Journal of Micromechanics and Microengineering, 20 (4). 045016.
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Official URL: http://stacks.iop.org/0960-1317/20/i=4/a=045016
This paper reports a simple and controllable technique to fabricate nano-gap electrodes using a combined electrochemical and chemical etching. A line of metal is initially patterned using a conventional lithography process at the width of 2 Âµm. The line is then continuously etched until it is discontinued at the desirable gap. We have been successfully fabricated a <10 nm gap between two Au electrodes. Meanwhile for Cr electrodes a controllable gap of <5 nm has been achieved.
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||01 Nov 2011 23:29|
|Last Modified:||02 Nov 2011 00:47|
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