Chugui, Yuri V and Yakovenko, Nikolay A and Yaluplin, Mikhail D (2010) A novel method for measurement of small opaque objects using Fraunhofer diffraction in divergent light. Measurement Science and Technology, 21 (5). 054012.
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Official URL: http://stacks.iop.org/0957-0233/21/i=5/a=054012
Abstract
High accuracy dimensional measurement of small objects with nano- or subnanometre resolution is a very urgent problem especially applied to micromechanics and nanotechnology. A new high precision method for measurement of small opaque objects using Fraunhofer diffraction in divergent light is presented. The algorithm, based on contrast analysis of the diffraction Fraunhofer pattern at its centre, allows determination of the sought parameter with high precision within a range from a few to dozens of microns. Experimental results are presented.
| Item Type: | Article |
|---|---|
| ID Code: | 11235 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 01 Nov 2011 23:29 |
| Last Modified: | 02 Nov 2011 00:47 |
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