Nano Archive

Fabrication of a nano/micro hybrid lens using gas-assisted hot embossing with an anodic aluminum oxide (AAO) template

Wu, Jing-Tang and Chang, Wei-Yi and Yang, Sen-Yeu (2010) Fabrication of a nano/micro hybrid lens using gas-assisted hot embossing with an anodic aluminum oxide (AAO) template. Journal of Micromechanics and Microengineering, 20 (7). 075023.

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Official URL: http://stacks.iop.org/0960-1317/20/i=7/a=075023

Abstract

This paper reports a novel and effective method for the fabrication of a polymeric nano/micro hybrid lens array. The nanostructure and microlens arrays are fabricated on the same polycarbonate (PC) substrate by hot embossing in sequence. First, an anti-reflection PC film with sub-wavelength nanostructures is fabricated using an anodic aluminum oxide (AAO) template. The anti-reflection characteristic of nanostructures on the PC film is evaluated. Then an array of convex microlenses is formed from the nanostructured PC film using a stainless steel mold with a microhole array. Both processes employ gas-assisted hot embossing to perform the partial protrusion of the film into nano-sized or micro-sized holes in the AAO template and steel mold. The optical property of the microlens has been verified. This proposed technique has proven its potential for effectively fabricating a nano/micro hybrid lens array on a polymeric substrate.

Item Type:Article
ID Code:11217
Deposited By:Prof. Alexey Ivanov
Deposited On:01 Nov 2011 23:30
Last Modified:02 Nov 2011 00:47

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