Nano Archive

MEMS-in-TEM for Nano Tribology

Fujita, Hiroyuki and Ishida, Tadashi and Sato, Takaaki and Nabeya, Shinsuke (2010) MEMS-in-TEM for Nano Tribology. Journal of Physics: Conference Series, 258 (1). 012004.

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Official URL: http://stacks.iop.org/1742-6596/258/i=1/a=012004

Abstract

We have developed a MEMS-in-TEM experimental system that enables the mechanical testing of nano junctions by MEMS microactuators in TEM (transmission electron microscope) for in situ atomic level observation of dynamic deformation. A nano junction between two sharp opposing tips was formed by bringing them into contact. Applying either tensile or shearing stress, we observed the elongation and changes in shape of the junction at real-time rate while applied force was measured. The experimental system and results of tensile and shear tests are described.

Item Type:Article
ID Code:11189
Deposited By:Prof. Alexey Ivanov
Deposited On:01 Nov 2011 23:26
Last Modified:02 Nov 2011 00:47

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