Nano Archive

Replica molding for multilevel micro-/nanostructure replication

Senn, T and Esquivel, J P and Lörgen, M and Sabaté, N and Löchel, B (2010) Replica molding for multilevel micro-/nanostructure replication. Journal of Micromechanics and Microengineering, 20 (11). p. 115012.

Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.

Official URL:


The development of micro- and nanofabrication processes with the capability to achieve three-dimensional structures is of great interest for a wide variety of applications. In this paper, a replica molding process for the replication of combined micro- and nanostructures in an epoxy-based photo resin is reported. First, multilevel masters were realized using standard micro- and nanofabrication processes. The structures from these masters were transferred to poly(dimethylsiloxane) (PDMS) stamps by soft lithography. Finally, the PDMS stamps were used for the replication of nano- and microstructures in the epoxy-based resin by UV casting. With this process, micro- and nanostructures of minimal dimensions of 50 nm were successfully replicated. Furthermore, the capabilities of the process were confirmed by the fabrication of a microfluidic device. In this system, the surface of micro channels was structured to modify its wetting properties and create hydrophobic and hydrophilic areas without any additional chemical treatment.

Item Type:Article
ID Code:11186
Deposited By:Prof. Alexey Ivanov
Deposited On:01 Nov 2011 23:25
Last Modified:02 Nov 2011 00:47

Repository Staff Only: item control page