Senn, T and Esquivel, J P and LÃ¶rgen, M and SabatÃ©, N and LÃ¶chel, B (2010) Replica molding for multilevel micro-/nanostructure replication. Journal of Micromechanics and Microengineering, 20 (11). p. 115012.
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Official URL: http://stacks.iop.org/0960-1317/20/i=11/a=115012
The development of micro- and nanofabrication processes with the capability to achieve three-dimensional structures is of great interest for a wide variety of applications. In this paper, a replica molding process for the replication of combined micro- and nanostructures in an epoxy-based photo resin is reported. First, multilevel masters were realized using standard micro- and nanofabrication processes. The structures from these masters were transferred to poly(dimethylsiloxane) (PDMS) stamps by soft lithography. Finally, the PDMS stamps were used for the replication of nano- and microstructures in the epoxy-based resin by UV casting. With this process, micro- and nanostructures of minimal dimensions of 50 nm were successfully replicated. Furthermore, the capabilities of the process were confirmed by the fabrication of a microfluidic device. In this system, the surface of micro channels was structured to modify its wetting properties and create hydrophobic and hydrophilic areas without any additional chemical treatment.
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||01 Nov 2011 23:25|
|Last Modified:||02 Nov 2011 00:47|
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