Nano Archive

Integration of UV-LIGA Process with Slip Casting for Fabricating Polycarbosilane-Derived Silicon Carbide MEMS

Namazu, T and Ishikawa, T and Hasegawa, Y and Kuroda, K and Takami, Y and Inoue, S (2011) Integration of UV-LIGA Process with Slip Casting for Fabricating Polycarbosilane-Derived Silicon Carbide MEMS. IOP Conference Series: Materials Science and Engineering, 18 (20). p. 202026.

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Official URL: http://stacks.iop.org/1757-899X/18/i=20/a=202026

Abstract

In this paper, a new technique for fabricating silicon carbide (Si-C) microelectromechanical systems (MEMS) is described. Slip casting to UV-thick photoresist (SU8) micro mold was carried out for the fabrication of three-dimensional Si-C MEMS parts. Ultrahigh molecular weight polycarbosilane (PCS) was used as the precursor. Si-C nano powder was firstly mixed with a PCS solution, and then the slips were cast into SU8 micro mold fabricated on porous tungsten carbide (WC) plate. Firing at 1273 K was conducted for SU8 evaporation and PCS pyrolysis simultaneously. We have succeeded in producing Si-C ceramics micro gears using the "μ slip casting" technique.

Item Type:Article
ID Code:11122
Deposited By:Prof. Alexey Ivanov
Deposited On:01 Nov 2011 23:23
Last Modified:02 Nov 2011 00:47

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