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Effect of slurry aging on stability and performance of chemical mechanical planarization process

Basim, G. Bahar (2011) Effect of slurry aging on stability and performance of chemical mechanical planarization process. Advanced Powder Technology, 22 (2). 257 - 265.

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Official URL: http://www.sciencedirect.com/science/article/pii/S...


Item Type:Article
Additional Information:Special issue of the 6th World Congress on Particle Technology
Uncontrolled Keywords:Extreme stabilization
ID Code:11064
Deposited By:SPI
Deposited On:17 Apr 2012 14:35
Last Modified:17 Apr 2012 14:35

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