Basim, G. Bahar (2011) Effect of slurry aging on stability and performance of chemical mechanical planarization process. Advanced Powder Technology, 22 (2). 257 - 265.
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Official URL: http://www.sciencedirect.com/science/article/pii/S...
|Additional Information:||Special issue of the 6th World Congress on Particle Technology|
|Uncontrolled Keywords:||Extreme stabilization|
|Deposited On:||17 Apr 2012 14:35|
|Last Modified:||17 Apr 2012 14:35|
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