Basim, G. Bahar (2011) Effect of slurry aging on stability and performance of chemical mechanical planarization process. Advanced Powder Technology, 22 (2). 257 - 265.
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Official URL: http://www.sciencedirect.com/science/article/pii/S...
| Item Type: | Article |
|---|---|
| Additional Information: | Special issue of the 6th World Congress on Particle Technology |
| Uncontrolled Keywords: | Extreme stabilization |
| ID Code: | 11064 |
| Deposited By: | SPI |
| Deposited On: | 17 Apr 2012 14:35 |
| Last Modified: | 17 Apr 2012 14:35 |
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