Fouad, O.A. and Geioushy, R.A. and El-Sheikh, S.M. and Khedr, M.H. and Ibrahim, I.A. (2011) Metalorganic chemical vapor deposition of Ti-O-C-N thin films using TBOT as a promising precursor. Journal of Alloys and Compounds, 509 (20). 6090 - 6095.
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