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Effect of thermal treatment on the growth, structure and luminescence of nitride-passivated silicon nanoclusters

Wilson, Patrick RJ and Roschuk, Tyler and Dunn, Kayne and Normand, Elise N and Chelomentsev, Evgueni and Zalloum, Othman HY and Wojcik, Jacek and Mascher, Peter (2011) Effect of thermal treatment on the growth, structure and luminescence of nitride-passivated silicon nanoclusters. Nanoscale Research Letters, 6 (1). pp. 1-12.

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Official URL: http://www.nanoscalereslett.com/content/pdf/1556-2...

Abstract

Silicon nanoclusters (Si-ncs) embedded in silicon nitride films have been studied to determine the effects that deposition and processing parameters have on their growth, luminescent properties, and electronic structure. Luminescence was observed from Si-ncs formed in silicon-rich silicon nitride films with a broad range of compositions and grown using three different types of chemical vapour deposition systems. Photoluminescence (PL) experiments revealed broad, tunable emissions with peaks ranging from the near-infrared across the full visible spectrum. The emission energy was highly dependent on the film composition and changed only slightly with annealing temperature and time, which primarily affected the emission intensity. The PL spectra from films annealed for duration of times ranging from 2 s to 2 h at 600 and 800°C indicated a fast initial formation and growth of nanoclusters in the first few seconds of annealing followed by a slow, but steady growth as annealing time was further increased. X-ray absorption near edge structure at the Si K- and L3,2-edges exhibited composition-dependent phase separation and structural re-ordering of the Si-ncs and silicon nitride host matrix under different post-deposition annealing conditions and generally supported the trends observed in the PL spectra.

Item Type:Article
Subjects:Physical Science > Nanophysics
Physical Science > Nano objects
Material Science > Nanochemistry
Material Science > Nanostructured materials
Divisions:Faculty of Engineering, Science and Mathematics > School of Physics
Faculty of Engineering, Science and Mathematics > School of Chemistry
ID Code:10978
Deposited By:JNCASR
Deposited On:16 Jul 2011 05:01
Last Modified:16 Jul 2011 05:01

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