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Polycrystallization effects on the nanoscale electrical properties of high-k dielectrics

Lanza, Mario and Iglesias, Vanessa and Porti, Marc and Nafria, Montse and Aymerich, Xavier (2011) Polycrystallization effects on the nanoscale electrical properties of high-k dielectrics. Nanoscale Research Letters, 6 (1). pp. 1-9.

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Official URL: http://www.nanoscalereslett.com/content/6/1/108

Abstract

In this study, atomic force microscopy-related techniques have been used to investigate, at the nanoscale, how the polycrystallization of an Al2O3-based gate stack, after a thermal annealing process, affects the variability of its electrical properties. The impact of an electrical stress on the electrical conduction and the charge trapping of amorphous and polycrystalline Al2O3 layers have been also analyzed.

Item Type:Article
Subjects:Physical Science > Nanophysics
Physical Science > Nano objects
Material Science > Nanochemistry
Material Science > Nanostructured materials
Divisions:Faculty of Engineering, Science and Mathematics > School of Physics
Faculty of Engineering, Science and Mathematics > School of Chemistry
ID Code:10865
Deposited By:JNCASR
Deposited On:20 Oct 2011 10:13
Last Modified:20 Oct 2011 10:13

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