Pivonenkov, B.I. and Shkolnikov, V.Ð. (2010) Triaxial Piezoresistive MEM-accelerometer. Journal of NANO and MICROSYSTEM TECHNIQUE (11).
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Abstract
There are described Triaxial MEM-accelerometer with single sensitive element and with are damping and stops of inertial mass shift.There are described calculated optimum characteristic of accelerometer: the inner dimensions for different thickness of sensitive element, length and width of bridge, are specified requirements to the piezoresistors, are given optimal characteristic of accelerometer for range 10 g with two substrates thickness: 450 and 600 microns. There are given propositions for serial manufacturer of accelerometers. Keywords: piezoresistive accelerometer, sensitive element, MEMS (Micro-Electro-Mechanical Systems), Triaxial MEM-accelerometer
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10332 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:41 |
| Last Modified: | 09 Dec 2010 09:29 |
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