Nano Archive

Triaxial Piezoresistive MEM-accelerometer

Pivonenkov, B.I. and Shkolnikov, V.М. (2010) Triaxial Piezoresistive MEM-accelerometer. Journal of NANO and MICROSYSTEM TECHNIQUE (11).

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There are described Triaxial MEM-accelerometer with single sensitive element and with are damping and stops of inertial mass shift.There are described calculated optimum characteristic of accelerometer: the inner dimensions for different thickness of sensitive element, length and width of bridge, are specified requirements to the piezoresistors, are given optimal characteristic of accelerometer for range 10 g with two substrates thickness: 450 and 600 microns. There are given propositions for serial manufacturer of accelerometers. Keywords: piezoresistive accelerometer, sensitive element, MEMS (Micro-Electro-Mechanical Systems), Triaxial MEM-accelerometer

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10332
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:41
Last Modified:09 Dec 2010 09:29

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