Chernov, V.A. and Palagushkin, A.N. and Prudnikov, N.V. and Sergeev, A.P. (2010) Manufacture and Investigations of Nanostructures for Direct Nuclearelectrical Energy Converting Based on Secondary Electrons. Journal of NANO and MICROSYSTEM TECHNIQUE (11).
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Abstract
Requirements to nanostructures metal-isolator-metal (MIM-structures) for direct nuclear-electrical energy converting based on secondary electrons are proved. Methods for MIM-structures manufacture - method of magnetron ionic-plasma dispersion and electronic beam dispersion method are described. Properties of made MIM-strucuires W-Al2O3-Al with thickness of layers 10, 100 and 10 nanometers, accordingly, are stated. Keywords: direct nuclear-electrical energy conversion, secondary electrons, metal-isolator-metal structures, method of magnetron ionic-plasma dispersion, electronic beam dispersion method
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10325 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:41 |
| Last Modified: | 09 Dec 2010 09:29 |
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