Nano Archive

Fabrication Technology of Integral Superconducting Bolometer for Terahertz Frequency Range

Kovalenko, A.G. and Kovtonuk, S.A. and Kuzmin, A.A. (2010) Fabrication Technology of Integral Superconducting Bolometer for Terahertz Frequency Range. Journal of NANO and MICROSYSTEM TECHNIQUE (10).

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Official URL: http:// www.microsystems.ru

Abstract

The fabrication technology of superconducting thin film bolometer coupled with a planar double-slot antenna was developed for 0.2—0.3 THz frequency range. Such integral bolometer was fully fabricated using e-beam lithography with organic masks of PMMA and its copolymer. As a thermometer and absorber was used thin film superconducting microstructure — magnetron sputtered titanium bridge made by the "lift-off technique. Such microstructure had critical temperature Tc about 0.35 К and worked as the transition edge sensor (TES). Antenna and all the supply lines were made of sputtered niobium. Keywords: submillimeter (terahertz) range of wavelengths (frequencies), superconducting direct detectors, superconducting bolometer, transition edge sensors, thin superconducting film, technology of micron, submicron and nanometer-superconductor structures, electron-beam21

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10315
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:41
Last Modified:09 Dec 2010 09:29

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