Kovalenko, A.G. and Kovtonuk, S.A. and Kuzmin, A.A. (2010) Fabrication Technology of Integral Superconducting Bolometer for Terahertz Frequency Range. Journal of NANO and MICROSYSTEM TECHNIQUE (10).
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Abstract
The fabrication technology of superconducting thin film bolometer coupled with a planar double-slot antenna was developed for 0.2â0.3 THz frequency range. Such integral bolometer was fully fabricated using e-beam lithography with organic masks of PMMA and its copolymer. As a thermometer and absorber was used thin film superconducting microstructure â magnetron sputtered titanium bridge made by the "lift-off technique. Such microstructure had critical temperature Tc about 0.35 Ð and worked as the transition edge sensor (TES). Antenna and all the supply lines were made of sputtered niobium. Keywords: submillimeter (terahertz) range of wavelengths (frequencies), superconducting direct detectors, superconducting bolometer, transition edge sensors, thin superconducting film, technology of micron, submicron and nanometer-superconductor structures, electron-beam21
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10315 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:41 |
| Last Modified: | 09 Dec 2010 09:29 |
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