Nano Archive

Criterion of Quality of Sensors Mechanical Quantitys

Pivonenkov, B.I. (2010) Criterion of Quality of Sensors Mechanical Quantitys. Journal of NANO and MICROSYSTEM TECHNIQUE (10).

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Official URL: http:// www.microsystems.ru

Abstract

There is offered qualitys criterion of sensors mechanical quantitys (quotient of square self-descriptiveness to energy of deformation sensor). Criterion explains evolution directions and results in period from 1970 to the present tense and allows compare sensors quality, optimize sensors constructions, technolodgys, circuits; value at prospect and tendencies of evolution. It is showed up, that requirements, execution of that is necessary for development of sensors can't be satisfied with present sensors and are necessary fundamentally nova decisions. Keywords: piezoresistive sensor of mechanical quantitys, sensitive element; MEMS (microelectromechanical systems); criterion of sensors quality; informativity of signal, resolution, noise voltage, energy of deformation, microminiaturization, nanosensor

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10313
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:41
Last Modified:09 Dec 2010 09:29

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