Nano Archive

An Effect of Precursor Preparation Techniques in the Film-Forming Solution on Electrical Properties of Ferroelectric PZT Films

Kotova, N.M. and Podgorny, Yu.V. and Seregin, D.S. and Sigov, А.S. and Vorotilov, К.А. (2010) An Effect of Precursor Preparation Techniques in the Film-Forming Solution on Electrical Properties of Ferroelectric PZT Films. Journal of NANO and MICROSYSTEM TECHNIQUE (10).

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Abstract

An effect of precursor preparation techniques in the film-forming solution synthesis process on electrical properties of thin lead zirconate titanate films is studied. It is shown that type of zirconium composition has a strong influence on the film properties. The process with the use of alcohol solution of zirconium propylate gives the best properties of the films. Keywords: ferroelectrics, chemical solution deposition, alkoxide, polarization, hysteresis

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10312
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:41
Last Modified:09 Dec 2010 09:29

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