Smolin, V.K. (2010) Thin-Film Resistive Elements of Sensors Primary Converters. Journal of NANO and MICROSYSTEM TECHNIQUE (9).
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Official URL: http:// www.microsystems.ru
Abstract
Review of design characteristics of sensors primary converters production for different functionality, using thin-film resistors as sensing elements. Keywords: resistor, thermal resistor, resistive-strain sensor, adsorption sensitive resistor, magnetoresistor, thin film, formation technology, primary converters
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10311 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:41 |
| Last Modified: | 09 Dec 2010 09:29 |
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