Nano Archive

Thin-Film Resistive Elements of Sensors Primary Converters

Smolin, V.K. (2010) Thin-Film Resistive Elements of Sensors Primary Converters. Journal of NANO and MICROSYSTEM TECHNIQUE (9).

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Official URL: http:// www.microsystems.ru

Abstract

Review of design characteristics of sensors primary converters production for different functionality, using thin-film resistors as sensing elements. Keywords: resistor, thermal resistor, resistive-strain sensor, adsorption sensitive resistor, magnetoresistor, thin film, formation technology, primary converters

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10311
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:41
Last Modified:09 Dec 2010 09:29

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