Smolin, V.K. (2010) Thin-Film Resistive Elements of Sensors Primary Converters. Journal of NANO and MICROSYSTEM TECHNIQUE (9).
Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.
Official URL: http:// www.microsystems.ru
Review of design characteristics of sensors primary converters production for different functionality, using thin-film resistors as sensing elements. Keywords: resistor, thermal resistor, resistive-strain sensor, adsorption sensitive resistor, magnetoresistor, thin film, formation technology, primary converters
|Additional Information:||Full text is in Russian|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||08 Dec 2010 23:41|
|Last Modified:||09 Dec 2010 09:29|
Repository Staff Only: item control page