Nano Archive

The New Type of Piezoresistive Sensors

Pivonenkov, B.I. (2010) The New Type of Piezoresistive Sensors. Journal of NANO and MICROSYSTEM TECHNIQUE (9).

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Official URL: http:// www.microsystems.ru

Abstract

There are suggested the new type of piezoresistive sensors with essentially better characteristics and more simple technology of manufacture by author. There are described constructions of sensors, are given results of calculation there characteristics in different versions of manufacture. Sensors have essentially better characteristics and minimal dispersion sensitivity. Keywords: sensor of mechanical quantities, piezoresitive sensor, sensitive element, MEM (microelectromechanical), energy of deformation, microminiaturization, nanosensor

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10310
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:41
Last Modified:09 Dec 2010 09:29

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