Bobrov, A.A. and Djuzhev, N.A. and Makhiboroda, M.A. and Mednikov, A.M. (2010) Analysis of the Gas Flow Membrane Anemometer output Signal in Stationry and Pulse Heating Mode. Journal of NANO and MICROSYSTEM TECHNIQUE (9).
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Construction and functioning principles of the developed thermoresistive gas flow sensor of the membrane type are described un the paper. Results of studying of differential output signal measurements of the this anemometer in a stationary and pulse mode regimes are discussed. Estimations of its dynamic range of flow measurements and resource of its working in the autonomic regime are presented. Keywords: MEMS-technology, gas flow sensor, temperature-compensated membrane, dynamic range of measurements, flow speed
|Additional Information:||Full text is in Russian|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||08 Dec 2010 23:40|
|Last Modified:||09 Dec 2010 09:29|
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