Belous, A.I. and Drozd, S.E. and Gasenkova, I.V. and Konnov, E.V. (2010) Technological Variant of Realization if the Design of Capacity Voltage Converter LSIC for MEMS Sensors. Journal of NANO and MICROSYSTEM TECHNIQUE (8).
Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.
Official URL: http:// www.microsystems.ru
In the article there are examined one of variants of constructive â technological construction and creation of capacity-voltage converter LSIC for electronic circuit of general application MEMS sensor. The suggested block diagram LSIC sensor can be used for making MEMS with capacitive output from a sensitive element. Keywords: optimization of parameters MEMS sensors, capacity-voltage converter, integrated circuits, designs, technology
|Additional Information:||Full text is in Russian|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||08 Dec 2010 23:40|
|Last Modified:||09 Dec 2010 09:29|
Repository Staff Only: item control page