Nano Archive

Technological Variant of Realization if the Design of Capacity Voltage Converter LSIC for MEMS Sensors

Belous, A.I. and Drozd, S.E. and Gasenkova, I.V. and Konnov, E.V. (2010) Technological Variant of Realization if the Design of Capacity Voltage Converter LSIC for MEMS Sensors. Journal of NANO and MICROSYSTEM TECHNIQUE (8).

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Abstract

In the article there are examined one of variants of constructive — technological construction and creation of capacity-voltage converter LSIC for electronic circuit of general application MEMS sensor. The suggested block diagram LSIC sensor can be used for making MEMS with capacitive output from a sensitive element. Keywords: optimization of parameters MEMS sensors, capacity-voltage converter, integrated circuits, designs, technology

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10302
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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