Dragunov, V.P. and Ostertak, D.I. (2010) Electrostatic Interactions in MEMS with Plane-Parallel Electrodes. Part II. Estimation of electrostatic forces. Journal of NANO and MICROSYSTEM TECHNIQUE (8).
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Abstract
The different approaches for calculation of electrostatic force components, acting between the electrodes of plane capacitor, composed of two identical rectangular or round electrodes, are compared. The analytical expressions for estimations of electrostatic force components are presented. The deviations in estimations of electrostatic force components, acting between the electrodes due to the variation of interelectrode gap and overlapping area of the electrodes, are calculated. Keywords: MEMS, electric capacitance, plane capacitor, fringing field effect, electrostatic force components
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10296 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:40 |
| Last Modified: | 09 Dec 2010 09:29 |
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