Nano Archive

Electrostatic Interactions in MEMS with Plane-Parallel Electrodes. Part II. Estimation of electrostatic forces

Dragunov, V.P. and Ostertak, D.I. (2010) Electrostatic Interactions in MEMS with Plane-Parallel Electrodes. Part II. Estimation of electrostatic forces. Journal of NANO and MICROSYSTEM TECHNIQUE (8).

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Official URL: http:// www.microsystems.ru

Abstract

The different approaches for calculation of electrostatic force components, acting between the electrodes of plane capacitor, composed of two identical rectangular or round electrodes, are compared. The analytical expressions for estimations of electrostatic force components are presented. The deviations in estimations of electrostatic force components, acting between the electrodes due to the variation of interelectrode gap and overlapping area of the electrodes, are calculated. Keywords: MEMS, electric capacitance, plane capacitor, fringing field effect, electrostatic force components

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10296
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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