Nano Archive

Calculation of the Thermal Mass Flow Membrane Sensor

Bobrov, A.A. and Djuzhev, N.A. and Kulagin, N.E. and Popkov, A.F. (2010) Calculation of the Thermal Mass Flow Membrane Sensor. Journal of NANO and MICROSYSTEM TECHNIQUE (8).

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Official URL: http:// www.microsystems.ru

Abstract

The paper is devoted to the design principles and main problems of developing of integer thermal anemometer fabricated by the usage of silicon membrane technology. Physical model of the developed anemometer construction is described. Theoretical analysis of temperature regimes of functioning of thermo-resistive transducer in the stationary mode and relation of output characteristics to the mostly important construction parameters are discussed. Calculated anemometer characteristic is compared with the results of experimental measurements. Keywords: MEMS-technology, gas flow sensor, temperature-compensated membrane, dynamic range of measurements, flow speed

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10293
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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