Nano Archive

Stress-Strain Behaviour of Modified Polyimide-Silicon Microstructural Elastic Hinges

Babaevsky, P.G. and Korpuhin, A.S. and Reznichenko, G.M. and Zhukov, A.A. (2010) Stress-Strain Behaviour of Modified Polyimide-Silicon Microstructural Elastic Hinges. Journal of NANO and MICROSYSTEM TECHNIQUE (7).

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Official URL: http:// www.microsystems.ru

Abstract

Studied the deformation-strength properties in tension polyimide-silicon trapezoidal elastic-hinged microstruc-tures, modified by reinforce the bottom of the polyimide layer of functionalized single-walled carbon nanotubes and coating the surface of silicon thin layers of silicon compounds, aluminum and vanadium-nickel system. It is shown that the introduction of reinforcement polyimide nanotubes in all cases increases the strain-strength characteristics of microstructures. Keywords: polyimide, silicon, trapezoidal elastic-hinged microstructure, microelectromechanical systems, the coefficient of thermal linear expansion, single-wall carbon nanotubes

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10290
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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