Babaevsky, P.G. and Korpuhin, A.S. and Reznichenko, G.M. and Zhukov, A.A. (2010) Stress-Strain Behaviour of Modified Polyimide-Silicon Microstructural Elastic Hinges. Journal of NANO and MICROSYSTEM TECHNIQUE (7).
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Official URL: http:// www.microsystems.ru
Abstract
Studied the deformation-strength properties in tension polyimide-silicon trapezoidal elastic-hinged microstruc-tures, modified by reinforce the bottom of the polyimide layer of functionalized single-walled carbon nanotubes and coating the surface of silicon thin layers of silicon compounds, aluminum and vanadium-nickel system. It is shown that the introduction of reinforcement polyimide nanotubes in all cases increases the strain-strength characteristics of microstructures. Keywords: polyimide, silicon, trapezoidal elastic-hinged microstructure, microelectromechanical systems, the coefficient of thermal linear expansion, single-wall carbon nanotubes
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10290 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:40 |
| Last Modified: | 09 Dec 2010 09:29 |
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