Nano Archive

Electrostatic Interactions in MEMS with Plane-Parallel Electrodes. Part I. Estimation of the capacitance

Dragunov, V.P. and Ostertak, D.I. (2010) Electrostatic Interactions in MEMS with Plane-Parallel Electrodes. Part I. Estimation of the capacitance. Journal of NANO and MICROSYSTEM TECHNIQUE (7).

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Official URL: http:// www.microsystems.ru

Abstract

The different approaches for calculation of the capacity of plane capacitor, composed of two identical square or round electrodes, versus interelectrode gap and relative electrodes displacement are compared. The deviations arising from capacitance calculations using different approaches are calculated. The analytical expression for capacitance estimation in case of the overlapping electrodes is presented. Keywords: MEMS, electric capacitance, plane capacitor, fringing field effect, analytical expressions

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10284
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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