Nano Archive

Computer Simulation of the Multistage Knudsen Micropump in Plane Geometry

Kloss, Yu.Yu. and Rogozin, O.A. and Tcheremissine, F.G. (2010) Computer Simulation of the Multistage Knudsen Micropump in Plane Geometry. Journal of NANO and MICROSYSTEM TECHNIQUE (6).

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Official URL: http:// www.microsystems.ru

Abstract

The multistage Knudsen micropump that is based on thermal creep phenomenon and do not have moving parts is studied by means of computer simulation. Parametric analysis of the pump performances is carried out. Solution of the Boltzmann kinetic equation is made with the application of the conservative projection method for the evaluation of the collision integral. Keywords: Knudsen pump, microdevices, thermal creep, Boltzmann equation, computer simulation

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10273
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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