Kloss, Yu.Yu. and Rogozin, O.A. and Tcheremissine, F.G. (2010) Computer Simulation of the Multistage Knudsen Micropump in Plane Geometry. Journal of NANO and MICROSYSTEM TECHNIQUE (6).
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Abstract
The multistage Knudsen micropump that is based on thermal creep phenomenon and do not have moving parts is studied by means of computer simulation. Parametric analysis of the pump performances is carried out. Solution of the Boltzmann kinetic equation is made with the application of the conservative projection method for the evaluation of the collision integral. Keywords: Knudsen pump, microdevices, thermal creep, Boltzmann equation, computer simulation
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10273 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:40 |
| Last Modified: | 09 Dec 2010 09:29 |
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