Barulina, M.A. and Dzhashitov, V.E. and Pankratov, V.M. (2010) The Theoretical Bases of Development and Creation of the Superminiature Micromechanica/ Multifunction Sensor of the Inertial Information. Journal of NANO and MICROSYSTEM TECHNIQUE (5).
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The possibility of creation superminiature (volume < 1 mm3) micromechanical multifunction (gyroscope + ac-celerometer) the sensor of the inertial information is considered and proved. The equations of motion of the senÂ¬sor on any way moving basis in view of temperature disturbances and technology factors are injected and analyzed. Possible baseline designs elastic suspension of sensor are offered. Estimations of strained-deformed state of the sensor at mechanical and thermal effects are received, by means of the constructed finite-element models. The estimation of efficiency of functioning of the sensor in view of temperature and technological errors is received. Keywords: superminiature micromechanical multifunction the sensor of the inertial information, equations of motion, finite-element models, strained-deformed state, temperature and technological errors
|Additional Information:||Full text is in Russian|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||08 Dec 2010 23:40|
|Last Modified:||09 Dec 2010 09:29|
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