Nano Archive

The Theoretical Bases of Development and Creation of the Superminiature Micromechanica/ Multifunction Sensor of the Inertial Information

Barulina, M.A. and Dzhashitov, V.E. and Pankratov, V.M. (2010) The Theoretical Bases of Development and Creation of the Superminiature Micromechanica/ Multifunction Sensor of the Inertial Information. Journal of NANO and MICROSYSTEM TECHNIQUE (5).

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Abstract

The possibility of creation superminiature (volume < 1 mm3) micromechanical multifunction (gyroscope + ac-celerometer) the sensor of the inertial information is considered and proved. The equations of motion of the sen¬sor on any way moving basis in view of temperature disturbances and technology factors are injected and analyzed. Possible baseline designs elastic suspension of sensor are offered. Estimations of strained-deformed state of the sensor at mechanical and thermal effects are received, by means of the constructed finite-element models. The estimation of efficiency of functioning of the sensor in view of temperature and technological errors is received. Keywords: superminiature micromechanical multifunction the sensor of the inertial information, equations of motion, finite-element models, strained-deformed state, temperature and technological errors

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10268
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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