Boginskaya, I.A. and Gusev, A.V. and Mailian, K.A. and Meshkov, A.S. (2010) Polymer Films on Based Poly-p-Ksylylene in Micro- and Optoelectronics. Journal of NANO and MICROSYSTEM TECHNIQUE (5).
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Abstract
Technology of creation of polymer coating on based poly-p-ksylylene and chlorine modified poly-p-ksylylene on uneven substrate surface is developed. Coating with thickness 50 nm â 50 m is obtained by vapor deposition polymerisation (VDP) method. Poly-p-ksylylene coating possess by humidity resistance, optical transparent, mechanical and electric strength, chemically inertness for most solvents, acids, and other outstanding properties. In thin poly-p-ksylylene film is obtained temperature resistance dependence with violently nonlinear character; hence, it can be used as thermo sensor. Film of poly-p-ksylylene can well be used as humidity resistance coating for optical and electronic devices. Keywords: polymer films, poly-p-ksylylene, protective coating, temperature resistance dependence, thermo sensor
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10265 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:40 |
| Last Modified: | 09 Dec 2010 09:29 |
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