Nano Archive

Polymer Films on Based Poly-p-Ksylylene in Micro- and Optoelectronics

Boginskaya, I.A. and Gusev, A.V. and Mailian, K.A. and Meshkov, A.S. (2010) Polymer Films on Based Poly-p-Ksylylene in Micro- and Optoelectronics. Journal of NANO and MICROSYSTEM TECHNIQUE (5).

Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.

Official URL: http://


Technology of creation of polymer coating on based poly-p-ksylylene and chlorine modified poly-p-ksylylene on uneven substrate surface is developed. Coating with thickness 50 nm — 50 m is obtained by vapor deposition polymerisation (VDP) method. Poly-p-ksylylene coating possess by humidity resistance, optical transparent, mechanical and electric strength, chemically inertness for most solvents, acids, and other outstanding properties. In thin poly-p-ksylylene film is obtained temperature resistance dependence with violently nonlinear character; hence, it can be used as thermo sensor. Film of poly-p-ksylylene can well be used as humidity resistance coating for optical and electronic devices. Keywords: polymer films, poly-p-ksylylene, protective coating, temperature resistance dependence, thermo sensor

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10265
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

Repository Staff Only: item control page