Boginskaya, I.A. and Gusev, A.V. and Mailian, K.A. and Meshkov, A.S. (2010) Polymer Films on Based Poly-p-Ksylylene in Micro- and Optoelectronics. Journal of NANO and MICROSYSTEM TECHNIQUE (5).
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Technology of creation of polymer coating on based poly-p-ksylylene and chlorine modified poly-p-ksylylene on uneven substrate surface is developed. Coating with thickness 50 nm â 50 &#61549;m is obtained by vapor deposition polymerisation (VDP) method. Poly-p-ksylylene coating possess by humidity resistance, optical transparent, mechanical and electric strength, chemically inertness for most solvents, acids, and other outstanding properties. In thin poly-p-ksylylene film is obtained temperature resistance dependence with violently nonlinear character; hence, it can be used as thermo sensor. Film of poly-p-ksylylene can well be used as humidity resistance coating for optical and electronic devices. Keywords: polymer films, poly-p-ksylylene, protective coating, temperature resistance dependence, thermo sensor
|Additional Information:||Full text is in Russian|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||08 Dec 2010 23:40|
|Last Modified:||09 Dec 2010 09:29|
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