Spirin, V.G. (2010) Mathematical Models of Thin-Film Resistor Impedance. Journal of NANO and MICROSYSTEM TECHNIQUE (5).
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The main kinds of errors and their effect on the thin-film resistor impedance are discussed. The model of the resistor nominal impedance includes additionally the systematic errors of its length and width as well as the im-pedance of the electrodes. The application of the above models makes it possible to design thin-film resistors with the size of 50 mkm and less without any change of the manufacturing process. Keywords: mathematical models, thin-film resistor
|Additional Information:||Full text is in Russian|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||08 Dec 2010 23:40|
|Last Modified:||09 Dec 2010 09:29|
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