Nano Archive

Mathematical Models of Thin-Film Resistor Impedance

Spirin, V.G. (2010) Mathematical Models of Thin-Film Resistor Impedance. Journal of NANO and MICROSYSTEM TECHNIQUE (5).

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The main kinds of errors and their effect on the thin-film resistor impedance are discussed. The model of the resistor nominal impedance includes additionally the systematic errors of its length and width as well as the im-pedance of the electrodes. The application of the above models makes it possible to design thin-film resistors with the size of 50 mkm and less without any change of the manufacturing process. Keywords: mathematical models, thin-film resistor

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10263
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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