Spirin, V.G. (2010) Mathematical Models of Thin-Film Resistor Impedance. Journal of NANO and MICROSYSTEM TECHNIQUE (5).
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Abstract
The main kinds of errors and their effect on the thin-film resistor impedance are discussed. The model of the resistor nominal impedance includes additionally the systematic errors of its length and width as well as the im-pedance of the electrodes. The application of the above models makes it possible to design thin-film resistors with the size of 50 mkm and less without any change of the manufacturing process. Keywords: mathematical models, thin-film resistor
| Item Type: | Article |
|---|---|
| Additional Information: | Full text is in Russian |
| ID Code: | 10263 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 08 Dec 2010 23:40 |
| Last Modified: | 09 Dec 2010 09:29 |
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