Nano Archive

Thin-Film Capacitive Microelectromechanical Systems with the Monolithic Dielectric

Belozubov, E.M. (2010) Thin-Film Capacitive Microelectromechanical Systems with the Monolithic Dielectric. Journal of NANO and MICROSYSTEM TECHNIQUE (4).

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Official URL: http:// www.microsystems.ru

Abstract

Thin-film capacitive microelectromechanical systems (TCMEMS) with the monolithic dielectric are considered. The strength and weakness of such systems are indicated. Keywords: thin-film capacitive microelectromechanical systems (TCMEMS), the monolithic dielectric

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10259
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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