Belozubov, E.M. (2010) Thin-Film Capacitive Microelectromechanical Systems with the Monolithic Dielectric. Journal of NANO and MICROSYSTEM TECHNIQUE (4).
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Thin-film capacitive microelectromechanical systems (TCMEMS) with the monolithic dielectric are considered. The strength and weakness of such systems are indicated. Keywords: thin-film capacitive microelectromechanical systems (TCMEMS), the monolithic dielectric
|Additional Information:||Full text is in Russian|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||08 Dec 2010 23:40|
|Last Modified:||09 Dec 2010 09:29|
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