Nano Archive

Numerical Modeling of Microelectronic Heat Flux Sensor

Dikareva, R.P. and Gridchin, V.A. and Lobach, O.V. (2010) Numerical Modeling of Microelectronic Heat Flux Sensor. Journal of NANO and MICROSYSTEM TECHNIQUE (4).

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Official URL: http:// www.microsystems.ru

Abstract

The paper presents a simplified thermal and finite-element models of microelectronic heat flux sensor, features of a design are discussed. Thermal resistance is defined and expressions for a target signal of a sensor control are received. It is shown that the numerical simulation accurately describes the characteristics compared with the analytical model. A comparison of model calculations with experimental data, which confirmed the correctness of models. The proposed numerical model allows the optimization of the characteristics of the sensor. Keywords: sensor, heat flow, microelectronic technology, finite element method

Item Type:Article
Additional Information:Full text is in Russian
ID Code:10256
Deposited By:Prof. Alexey Ivanov
Deposited On:08 Dec 2010 23:40
Last Modified:09 Dec 2010 09:29

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