Dikareva, R.P. and Gridchin, V.A. and Lobach, O.V. (2010) Numerical Modeling of Microelectronic Heat Flux Sensor. Journal of NANO and MICROSYSTEM TECHNIQUE (4).
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The paper presents a simplified thermal and finite-element models of microelectronic heat flux sensor, features of a design are discussed. Thermal resistance is defined and expressions for a target signal of a sensor control are received. It is shown that the numerical simulation accurately describes the characteristics compared with the analytical model. A comparison of model calculations with experimental data, which confirmed the correctness of models. The proposed numerical model allows the optimization of the characteristics of the sensor. Keywords: sensor, heat flow, microelectronic technology, finite element method
|Additional Information:||Full text is in Russian|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||08 Dec 2010 23:40|
|Last Modified:||09 Dec 2010 09:29|
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